拡張ナノ空間実践演習

This experimental course aims at giving Ph.D students an introduction to MEMS devices. MEMS is the key device for future society; despite its broad application fields, the principle of such device is simple. The students can learn such principles and study by designing and measuring his / her own in-plane oscillating MEMS device.

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授業計画

The lecture will be around summer vacation period. Five day's course. Attendee are requested to present at all the days. 1. Introduction to MEMS devices 2. Introduction to CAD design 3. Design of in-plane vibrating MEMS 4. Introduction to Cleanroom 5. Fabrication of MEMS device in Takeda Supercleanroom 6. Frequency response measurement with Micro System Analyzer 7. Equation and simulation based analysis of the measured device.

授業の方法

Face-to-face: All classes conducted in-person on campus

成績評価方法

Attendance, designed MEMS, and presentation.

履修上の注意

集中講義で実施します．受講にはGMSI事務局<*****>へ申込が必要です．講義日程など詳細は決定次第、GMSIホームページ <http://gmsi.t.u-tokyo.ac.jp/*****> に掲載します． This is an intensive lecture. If you wish to take the course, you are required to apply the GMSI office<*****> in advance. The lecture schedule and the the detailed information will be updated on GMSI Homepage <http://gmsi.t.u-tokyo.ac.jp/*****> as soon as it is decided.