The lecture will be around summer vacation period. Five day's course. Attendee are requested to present at all the days.
1. Introduction to MEMS devices
2. Introduction to CAD design
3. Design of in-plane vibrating MEMS
4. Introduction to Cleanroom
5. Fabrication of MEMS device in Takeda Supercleanroom
6. Frequency response measurement with Micro System Analyzer
7. Equation and simulation based analysis of the measured device.
2019年度講義スケジュール:
8月1日(木) Introductory Course, MEMS design
8月2日(金)、5日(月)Fabrication
8月6日(火) Measurement
8月7日(水) Analyses and Wrap-up
会場:武田先端知ビル
Lecture Schedule 2019:
Aug. 1 Thu Introductory Course, MEMS design
Aug. 2 Fri and Aug. 5 Mon Fabrication
Aug. 6 Tue Measurement
Aug. 7 Wed Analyses and Wrap-up
Venue: Takeda Sentanchi Building